Entegris Inc., headquartered in Billerica, Massachusetts, specializes in advanced materials and process solutions for the semiconductor and high-technology industries. The company’s core offerings include purification systems, specialty coatings, high-performance materials and microcontamination control products. By integrating materials science with precision engineering, Entegris helps chip makers and other manufacturers maintain the ultraclean environments required for the production of leading-edge devices, from logic and memory chips to advanced packaging and 3D integration platforms.
The company’s product portfolio encompasses filtration and purification technologies for gases and liquids, single-use systems for chemical delivery, wafer handling and carrier solutions, and surface modification materials such as chemical mechanical planarization slurries and specialty polymers. Entegris’ contamination-control carriers and robotics protect silicon wafers from particulates and airborne molecular contaminants, while its engineered materials—resins, dispersions and coatings—enhance yield and reliability across critical semiconductor fabrication steps.
Entegris traces its roots back to the 1960s with the founding of Fluoroware Inc., which introduced the first fluoropolymer wafer carriers. The modern company was formed through strategic M&A, including the 2005 merger with Mykrolis and subsequent acquisitions of ATMI and Digital Specialty Chemicals. These moves broadened its capabilities in materials engineering and scaled its global footprint. Today, Entegris operates research, manufacturing and service facilities across North America, Europe and the Asia-Pacific region, serving major semiconductor hubs in Taiwan, South Korea, China, Japan and Europe.
Under the leadership of President and CEO Bertrand Loy, Entegris maintains a focus on R&D investments and collaborative partnerships with equipment suppliers, foundries and chip designers. The company’s executive management team, supported by a board of independent directors, emphasizes sustainable manufacturing practices and continuous innovation to address evolving contamination challenges. Entegris remains committed to delivering reliable, high-value solutions that help customers achieve higher yields and drive next-generation semiconductor performance.
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