| 05/14/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Redinbo Greg (1940017) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/14/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Titinger Jorge (1385162) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/14/2026 3:16 PM | Axcelis Technologies (1113232) Subject Sutton Todd (2124265) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 05/13/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Mahoney Robert John (2101601) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/13/2026 3:19 PM | Axcelis Technologies (1113232) Subject Titinger Jorge (1385162) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 05/12/2026 4:13 PM | Axcelis Technologies (1113232) Subject Mahoney Robert John (2101601) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 05/08/2026 11:20 AM | Axcelis Technologies (1113232) Filer | Form 10-Q General form for quarterly reports under Section 13 or 15(d) | |
| 05/07/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Low Russell (1689237) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/07/2026 9:38 AM | Axcelis Technologies (1113232) Subject FMR LLC (315066) Filed by | Form SCHEDULE 13G/A | |
| 05/06/2026 3:31 PM | Axcelis Technologies (1113232) Subject Low Russell (1689237) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 05/06/2026 3:01 PM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
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| 05/06/2026 10:00 AM | Axcelis Technologies (1113232) Subject FMR LLC (315066) Filed by | Form SCHEDULE 13G | |
| 05/04/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Low Russell (1689237) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/01/2026 3:43 PM | Axcelis Technologies (1113232) Subject Low Russell (1689237) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 04/21/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Tatnall Christopher (1990732) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 04/02/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Low Russell (1689237) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 04/01/2026 3:49 PM | Axcelis Technologies (1113232) Subject Low Russell (1689237) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 03/31/2026 6:33 AM | Axcelis Technologies (1113232) Filer | Form ARS | |
| 03/31/2026 6:28 AM | Axcelis Technologies (1113232) Filer | Form DEF 14A | |
| 03/26/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Low Russell (1689237) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 03/26/2026 3:09 PM | Axcelis Technologies (1113232) Subject VANGUARD GROUP INC (102909) Filed by | Form SCHEDULE 13G/A | |
| 03/25/2026 4:26 PM | Axcelis Technologies (1113232) Issuer Sutton Todd (2124265) Reporting | Form 3 Initial statement of beneficial ownership of securities | |
| 03/24/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Ryzhik David (2123863) Reporting | Form 3 Initial statement of beneficial ownership of securities | |
| 03/24/2026 3:28 PM | Axcelis Technologies (1113232) Subject Low Russell (1689237) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 02/12/2026 4:22 PM | Axcelis Technologies (1113232) Filed by VEECO INSTRUMENTS INC (103145) Subject | Form 425 | |
| 02/06/2026 3:40 PM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 02/06/2026 3:41 PM | Axcelis Technologies (1113232) Subject | Form 425 | |
| 02/02/2026 6:00 AM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 02/02/2026 6:02 AM | Axcelis Technologies (1113232) Subject | Form 425 | |
| 01/28/2026 4:18 PM | Axcelis Technologies (1113232) Subject | Form 425 | |
| 01/28/2026 4:18 PM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 01/16/2026 4:05 PM | Axcelis Technologies (1113232) Issuer Mahoney Robert John (2101601) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 01/01/2026 11:15 PM | Axcelis Technologies (1113232) Filer | Form EFFECT | |
| 12/31/2025 3:05 PM | Axcelis Technologies (1113232) Filer | Form 424B3 | |
| 12/29/2025 4:19 PM | Axcelis Technologies (1113232) Filer | Form S-4/A | |
| 12/22/2025 4:09 PM | Axcelis Technologies (1113232) Issuer Mahoney Robert John (2101601) Reporting | Form 3 Initial statement of beneficial ownership of securities | |
| 12/18/2025 4:05 PM | Axcelis Technologies (1113232) Issuer Evans Eileen (1715912) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 12/18/2025 4:05 PM | Axcelis Technologies (1113232) Issuer Titinger Jorge (1385162) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 12/17/2025 3:04 PM | Axcelis Technologies (1113232) Subject Titinger Jorge (1385162) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |
| 12/12/2025 4:05 PM | Axcelis Technologies (1113232) Issuer Blumenstock Gerald M (1979418) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 12/08/2025 4:08 PM | Axcelis Technologies (1113232) Filer | Form S-4 Registration statement under Securities Act of 1933 | |
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| 11/06/2025 2:37 PM | Axcelis Technologies (1113232) Filer | Form 10-Q General form for quarterly reports under Section 13 or 15(d) | |
| 11/04/2025 7:17 AM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 10/17/2025 4:05 PM | Axcelis Technologies (1113232) Issuer COOGAN JAMES GORDON (1797868) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 10/01/2025 4:26 PM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 10/01/2025 4:27 PM | Axcelis Technologies (1113232) Subject | Form 425 | |
| 10/01/2025 6:06 AM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 10/01/2025 6:08 AM | Axcelis Technologies (1113232) Subject | Form 425 | |
| 09/17/2025 4:05 PM | Axcelis Technologies (1113232) Issuer Redinbo Greg (1940017) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 09/17/2025 4:05 PM | Axcelis Technologies (1113232) Issuer Tatnall Christopher (1990732) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 08/14/2025 7:56 AM | AMERICAN CENTURY INVESTMENT MANAGEMENT INC (52388) Filed by Axcelis Technologies (1113232) Subject | Form SCHEDULE 13G | |
| 08/05/2025 4:19 PM | Axcelis Technologies (1113232) Filer | Form 10-Q General form for quarterly reports under Section 13 or 15(d) | |
| 08/05/2025 7:43 AM | Axcelis Technologies (1113232) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 05/29/2025 4:16 PM | Axcelis Technologies (1113232) Filer | Form S-8 Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans | |
| 05/20/2025 3:36 PM | Axcelis Technologies (1113232) Subject KURTZWEIL JOHN T (1184588) Reporting | Form 144 Notice of proposed sale of securities pursuant to Rule 144 | |