| 05/27/2026 3:02 PM | Onto Innovation (704532) Filer | Form SD Specialized Disclosure Report | |
| 05/22/2026 3:53 PM | Onto Innovation (704532) Issuer SEAMS CHRISTOPHER A (1212426) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/22/2026 3:55 PM | Onto Innovation (704532) Issuer Su May (1918546) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/22/2026 3:43 PM | Kelley Stephen Douglas (1443674) Reporting Onto Innovation (704532) Issuer | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/22/2026 3:46 PM | Lynch Susan D (1784973) Reporting Onto Innovation (704532) Issuer | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/22/2026 3:48 PM | MILLER DAVID BRIAN (1233488) Reporting Onto Innovation (704532) Issuer | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/22/2026 3:51 PM | Onto Innovation (704532) Issuer SCHWARTZ STEPHEN S (1247436) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/20/2026 3:01 PM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 05/18/2026 4:01 PM | OH Yoon Ah (1889970) Reporting Onto Innovation (704532) Issuer | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/18/2026 4:03 PM | Onto Innovation (704532) Issuer YALDAEI RAMIL (1976282) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 05/18/2026 6:53 AM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
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| 05/05/2026 4:01 PM | Onto Innovation (704532) Filer | Form 10-Q General form for quarterly reports under Section 13 or 15(d) | |
| 05/05/2026 3:06 PM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 04/29/2026 1:33 PM | Onto Innovation (704532) Subject VANGUARD PORTFOLIO MANAGEMENT LLC (2100121) Filed by | Form SCHEDULE 13G | |
| 04/29/2026 9:18 AM | Onto Innovation (704532) Subject VANGUARD CAPITAL MANAGEMENT LLC (2100119) Filed by | Form SCHEDULE 13G | |
| 04/16/2026 8:02 AM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 03/04/2026 3:46 PM | Dolev Ido (2046735) Reporting Onto Innovation (704532) Issuer | Form 4 Statement of changes in beneficial ownership of securities | |
| 03/04/2026 3:47 PM | Onto Innovation (704532) Issuer ROBERTS BRIAN K (1259094) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 02/19/2026 3:11 PM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 12/29/2025 3:09 PM | Onto Innovation (704532) Issuer Plisinski Michael P (1325550) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 12/04/2025 3:04 PM | Dolev Ido (2046735) Reporting Onto Innovation (704532) Issuer | Form 4 Statement of changes in beneficial ownership of securities | |
| 11/21/2025 3:11 PM | Onto Innovation (704532) Filer | Form S-8 Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans | |
| 11/21/2025 3:03 PM | Onto Innovation (704532) Filer | Form S-3 Registration statement under Securities Act of 1933 | |
| 11/21/2025 3:04 PM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 11/17/2025 7:17 AM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 11/06/2025 4:01 PM | Onto Innovation (704532) Filer | Form 10-Q General form for quarterly reports under Section 13 or 15(d) | |
| 10/17/2025 5:41 PM | BlackRock, Inc. (2012383) Filed by Onto Innovation (704532) Subject | Form SCHEDULE 13G/A | |
| 10/10/2025 8:00 AM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 10/06/2025 3:06 PM | Onto Innovation (704532) Issuer YALDAEI RAMIL (1976282) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 09/03/2025 3:08 PM | Chen Shirley (2074793) Reporting Onto Innovation (704532) Issuer | Form 4 Statement of changes in beneficial ownership of securities | |
| 09/03/2025 3:08 PM | Onto Innovation (704532) Issuer ROBERTS BRIAN K (1259094) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |
| 08/07/2025 3:46 PM | Onto Innovation (704532) Filer | Form 10-Q General form for quarterly reports under Section 13 or 15(d) | |
| 07/11/2025 3:03 PM | Onto Innovation (704532) Filer | Form 8-K/A | |
| 06/30/2025 8:05 AM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 06/16/2025 7:54 AM | Onto Innovation (704532) Filer | Form 8-K Current report pursuant to Section 13 or 15(d) | |
| 06/13/2025 3:47 PM | Onto Innovation (704532) Issuer Slicer Mark (1930126) Reporting | Form 4 Statement of changes in beneficial ownership of securities | |